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060114: A Single-Input, Single-Output (SISO) Microcantilever Sensor

In recent years microcantilever structures have gained wide acceptance for use as physical, chemical and biological sensors. Such sensors consist of a silicon or poly silicon beam coated with a substance that activates the surface such that it will absorb the material to be sensed. As the target material is absorbed, the mass, and thus the resonant...
Published: 7/21/2014   |   Inventor(s): Jeffrey Rhoads, Steven Shaw, Barry Demartini, Kimberly Turner
Keywords(s): Biological Detection, Chemical Detection, Chemical Sensor, Mass Sensor, Sensor Array Category(s): Biotechnology, Devices, Electrical