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030073: Improved Force Sensing on Nano-Manipulated Objects

Efficient manipulation of nano-sized objects will require an effective means for sensing the force exerted by a nanoprobe on the object. Current PZT (lead zirconium titante)-based piezoelectric force sensors are limited in their sensitivity. Description By using a highly sensitive polyvinylidene fluoride (PVDF) piezoelectric force sensor to measure...
Published: 7/21/2014   |   Inventor(s): Ning Xi, Yantao Shen, Fathi Salem
Keywords(s): Force Sensor, Integrated Circuit, Microassembly, Micromanipulation, Piezoelectric, Signal Processing Category(s): Electrical, Nanotechnology, Devices