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020015: Microstripline Circuits for Microwave Plasma Discharges

Widely used in a variety of products and processes, plasmas are generated by applying a voltage between electrodes to facilitate gas ionization. The voltage may be static (DC) or varying at a fixed rate that can be in the RF range (<100 KHz) or as high as tens of MHz in frequency. Typical plasmas have a characteristic physical dimension on the...
Published: 7/21/2014   |   Inventor(s): Timothy Grotjohn, Jes Asmussen, Andy Wijaya
Keywords(s): MEMS, Microstrip, Microwave, Plasma, Stripline Category(s): Mechanical, Nanotechnology, Electrical