060114: A Single-Input, Single-Output (SISO) Microcantilever Sensor
Case ID:
TEC2006-0114
Web Published:
7/21/2014
Description:
In recent years microcantilever structures have
gained wide acceptance for use as physical, chemical and biological sensors.
Such sensors consist of a silicon or poly silicon beam coated with a substance
that activates the surface such that it will absorb the material to be sensed.
As the target material is absorbed, the mass, and thus the resonant bending or
vibrational frequency, of the beam changes signaling the material's presence.
Generally, due to practical limitations, only a lone analyte or group of
analytes can be detected through this approach. Arrays of isolated oscillators,
individually functionalized to detect different analytes, can be used to broaden
detection capabilities. However, the inherent complexity of such arrays limits
their utility.
Description
The Single Input - Single Output (SISO) Sensor
consists of a number (n) of functionalized, frequency-mistuned microbeam
resonators connected to a common shuttle mass, which is used for both actuation
and sensing. Given vibration localization in the set of mistuned oscillators,
the shuttle mass itself can be used to track resonance shifts in the individual
microbeams. This structure can, in principal, be used to detect any type, number
and combination of analytes, producing an equal result to that of an array of
individual sensors. However, the SISO sensor is considerably less complex since
there is only one input and one output needed to control n sensors. This allows
for the building of SISO structures that will be much smaller and simpler than
the aggregate of n standard microbeam sensors, and therefore less
expensive.
Benefits
- Reduced
size/cost: The sensor uses a single input and single output to actuate
the resonant vibrations and sense frequency shifts associated with detection.
This reduced complexity leads to smaller size and simpler electronics
resulting in lower overall cost.
- Highly
manufacturable: Employs the standard Micro-Electro-Mechanical Systems
(MEMS) technology used in the fabrication of conventional single analyte
microcantilever structures.
- High
sensitivity: Comparable to individual microcantilever
sensors.
- Fast
response: Identical to individual microcantilever sensors.
- Low power
consumption: Identical to individual microcantilever
sensors.
Applications
Applications are identical to those addressed by
conventional sensor arrays, including: healthcare (PSA and LDL screening),
biomedical (gene sequencing), military (explosives detection), homeland security
(biotoxin detection), and environmental monitoring (herbicide or heavy metal
detection).
IP Protection
Status
1 U.S. patent issued:
7,584,649
Patent Information:
App Type |
Country |
Serial No. |
Patent No. |
File Date |
Issued Date |
Expire Date |
For Information, Contact:
Raymond Devito
Technology Manager
Michigan State University - Test
517-355-2186
devitora@msu.edu